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UHF Aluminum Nitride FBAR Trampoline-Shape Resonators with Gold-Aluminum Electrodes and Silicon Substrate with Through Thickness Vibrations: Computational Performance

Annie Ruimi, Yueming Liang, Robert M. McMeeking


The performance of a microelectromechanical aluminum nitride FBAR resonator in the shape of a trampoline undergoing through thickness vibrations and designed for UHF filtering applications is analyzed using three-dimensional finite element simulations. A trampoline resonator is a beamsupported circular resonator suspended over an air cavity. Performance is evaluated by means of the effective acoustic coupling coefficient K2 and the quality factor Q which are calculated from the electrical impedance frequency response. Material damping is accounted for in the simulations. Energy loss from the resonator to its surrounding is also investigated by supporting the resonator’s beams on a silicon substrate. It is found that electrodes that have thickness 15% or less of the piezoelectric layer yield the best performance figure (K2Q ~120) and that Q attains a maximum for electrode thickness that is a quarter of the wave length of the resonant frequency. Simulations results are compared with test results of a similar device fabricated by research collaborators at UCSB.


piezoelectricity, FBAR, MEMS, resonance, FEM

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