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2D and 3D Numerical Modeling of One-Port SAW Resonator using Finite Element Method

S. Maouhoub, Y. Aoura, M. Radouani, B. El Fahime, A. Mir


In this paper, a finite element method (FEM) with perfectly matched layer (PML) boundary condition is applied to detailed numerical modeling of surface acoustic wave (SAW) resonators used 41° rotated Y-cut LiNbO3 with Al Interdigital Transducers (IDT). Various parameters such as velocity, electromechanical coupling K2 and normalized reflection coefficient r for 2D and 3D models are computed. The comparison of results from 2D and 3D simulations of a resonator is presented.


SAW, FEM, IDT; 3D model; 2D model, perfectly matched layer

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