Open Access Open Access  Restricted Access Subscription or Fee Access

Mass Spectrometric Study of Energy Distributions of Sputtered Copper Monomer under Low Energy Ar+ Ions Bombardments

Hikmat A. Hamad, Haitham M. Farok


Secondary neutral mass spectrometry (SNMS) involving post ionized sputtered neutrals, has been used to determine the energy distribution of neutral Cu1 particles sputtered from a polycrystalline Cu target by normally incident Ar+ ions with energies ranging between 100 – 240 eV. A magnetically confined arc discharge at low Ar pressure, located in the source region of the mass spectrometer, has been used for ion bombardment of the target, and simultaneously for electron impact post-ionization of sputtered neutrals ejected normal to the target. The energy distribution of sputtered neutral atoms was found to exhibit a peak at an ejection energy of 4.2 eV, and tail – off above this energy, approximately, as E1.72.This asymptotic behavior is discussed in view of Sigmund–Thompson model of the random collision cascade. The average energy of the sputtered atoms increases from 7 eV to 9 eV within the ion energy range of 100 - 240 eV.


Secondary neutral mass spectrometry (SNMS); energy distribution; Sigmund–Thompson model

Full Text:


Disclaimer/Regarding indexing issue:

We have provided the online access of all issues and papers to the indexing agencies (as given on journal web site). It’s depend on indexing agencies when, how and what manner they can index or not. Hence, we like to inform that on the basis of earlier indexing, we can’t predict the today or future indexing policy of third party (i.e. indexing agencies) as they have right to discontinue any journal at any time without prior information to the journal. So, please neither sends any question nor expects any answer from us on the behalf of third party i.e. indexing agencies.Hence, we will not issue any certificate or letter for indexing issue. Our role is just to provide the online access to them. So we do properly this and one can visit indexing agencies website to get the authentic information.